Title page for 982212005


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Student Number 982212005
Author Yi-Min Su(蘇義閔)
Author's Email Address No Public.
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Department Institute of Lighting and Display Science
Year 2010
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Fabrication of Nano-Patterned Sapphire Substrate Using Anodic Aluminum Oxide Technology
Date of Defense 2011-06-02
Page Count 66
Keyword
  • Patterned Sapphire Substrate
  • PSS
  • Abstract GaN-based light-emitting diodes (LEDs) structure were grown on Flower-patterned sapphire (FPSS) substrates fabricated by using Anodic Aluminum Oxide (AAO) technology. The crystalline quality of the epitaxial film could be improved by using the FPSS technique. The output power of LED grown on FPSS was 126% and 10% higher than those of LEDs grown on planar sapphire and micro-patterned sapphire substrate (MPSS) at the injection current of 20mA, respectively. The improvement of output power of LED FPSS compared with LED MPSS was attributed the enhancement of light extraction efficiency via nano-patterns that efficiently scatter the guided light to outside.
     The output power of LED grown on the period of 6μm of FPSS (FPSS-P6) was 13% higher than the LED grown on the period of 10μm of FPSS at the injection current of 20mA. The improvement of output power of LED FPSS-P6 was attributed the enhancement of light extraction efficiency.
    Table of Content 摘要i
    Abstractiii
    致謝iv
    目錄v
    圖目錄viii
    表目錄xi
    第一章 導論1
    1.1前言1
    1.2研究動機與目的2
    第二章 實驗原理與量測系統4
    2.1陽極氧化鋁簡介4
    2.1.1陽極氧化鋁結構與形成4
    2.1.2陽極氧化鋁形成機制5
    2.1.3陽極氧化鋁形成之化學反應6
    2.2量測系統8
    2.2.1掃描式電子顯微鏡8
    2.2.2原子力顯微鏡8
    2.2.3X-ray繞射儀9
    2.2.4光電特性量測儀9
    2.2.5電流電壓量測系統10
    第三章 實驗製程方法與步驟11
    3.1利用陽極氧化法製作金屬遮罩之比較分析11
    3.1.1陽極氧化法之架構圖11
    3.1.2陽極氧化反應之操作條件12
    3.1.3利用不同反應時間之氧化鋁為乾蝕刻遮罩之比較分析13
    3.2奈米結構圖案化藍寶石基板之製程14
    3.3氮化鎵發光二極體元件之製程18
    第四章 氮化鎵薄膜成長於圖案化藍寶石基板之分析21
    4.1氮化鎵薄膜之掃描式電子顯微鏡量測及分析21
    4.2氮化鎵薄膜之X-ray繞射儀量測及分析22
    4.3氮化鎵薄膜之單位面積缺陷數量測及分析23
    第五章 氮化鎵發光二極體元件之光電特性分析24
    5.1成長於微米及奈米結構圖案化藍寶石基板的氮化鎵發光二極體之(a) (a)光電特性24
    5.2成長於不同週期奈米結構圖案化藍寶石基板的氮化鎵發光二極體(a) (a)之光電特性27
    第六章 結論與未來展望30
    參考文獻33
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    Advisor
  • Cheng-Huang Kuo(郭政煌)
  • Files
  • 982212005.pdf
  • approve in 3 years
    Date of Submission 2011-07-18

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