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Student Number 965301024
Author Kang-Jung Peng(彭康榮)
Author's Email Address david.peng50137@yahoo.com.tw
Statistics This thesis had been viewed 699 times. Download 636 times.
Department Executive Master of Electrical Engineering
Year 2010
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Two-dimensional Electric-field Simulation for Optimal Design of Interdigitated Capacitive Biosensor by Taguchi Method
Date of Defense 2011-07-04
Page Count 155
Keyword
  • Capacitance
  • Interdigitated electrode
  • Taguchi's method
  • Abstract The goal of this research is to develop an interdigitated capacitive biosensor with maximum capacitive response and highest sensitivity. This research concentrated on two-dimensional electric-filed simulation using ADS (Advanced Design System) to analyze and understand the capacitive response of interdigitated biosensors. Furthermore, Taguchi method was employed to find the optimal electrode geometric parameters. The optimal geometric parameters of interdigitated capacitive biosensor thus determined were: electrode width = 1200 μm, electrode spacing = 0.01 μm, electrode thickness = 500 μm, and overlapping length = 10000 μm. The capacitance of this optimal design was 795.17 times as big as that of an interdigitated capacitive biosensor with ordinary geometric parameters. The capacitance of an interdigitated biosensor is determined collectively by its geometric parameters. According to the results by Taguchi method, the relevant parameters and their weights of influences were: electrode width (31.65%), electrode spacing (26.154%), electrode thickness (23.154%), and overlapping length (19.039%). A suboptimal design was proposed to meet the current process limitation. The electrode width and spacing were both changed to 10um, whereas the electrode thickness and overlapping length followed the optimal geometric design. The resultant capacitance was reduced to 1/5.53 times as big as that of the optimal design. Nevertheless, it was still 142.96 times as big as that with the ordinary geometric parameters. For detection of DNA, protein, cell, et. al., by biosensors of suboptimal geometry design, the sensitivity doubled that of the ordinary design and was commensurate to that of the optimal design. Hence, the suboptimal design represents a good choice for capacitive biosensors to attain high sensitivity
    under current process limitation.
    Table of Content 中文摘要................................................................................................... I
    英文摘要................................................................................................... II
    誌謝........................................................................................................... IV
    目錄........................................................................................................... V
    圖目錄....................................................................................................... IX
    表目錄....................................................................................................... XIV
    第一章 緒論............................................................................................. 1
    1-1 前言.................................................................................................... 1
    1-2 生物感測器介紹................................................................................ 2
    1-2-1 生物感測器的定義與其發展歷史回顧................................. 2
      1-2-2 生物感測器類型與設計......................................................... 5
    1-3 電化學生物感測器之電容特性........................................................ 12
      1-3-1 不同等效電路的介紹............................................................. 12
      1-3-2 電雙層架構與理論................................................................. 15
      1-3-3 介電電容原理推導................................................................. 19
    1-4 電容式生物感測器之簡介................................................................ 26
      1-4-1電容生物感測器應用範圍...................................................... 26
      1-4-2 常見電容式感測器之電極型式介紹.................................... 34
      1-4-3 指叉式電容感測器之介紹與幾何參數之文獻回顧............ 37
    第二章 研究動機與目的......................................................................... 50
    2-1 研究動機............................................................................................ 50
    2-2 研究目標............................................................................................ 52
    第三章 設計最佳指叉式電容生物感測器............................................. 54
    3-1 設計指叉式電容生物感測器之幾何參數範圍................................ 54
      3-1-1 定義指叉式電極參數及設定幾何參數之分析範圍............ 54
      3-1-2實驗目的................................................................................. 54
      3-1-3 設定電極寬度對於指叉式電容生物感測器之分析範圍.... 56
         3-1-3-1 實驗方法................................................................. 56
         3-1-3-2 擴大研究電極寬度對於電容大小之影響............. 57
      3-1-4 設定電極間距對於指叉式電容生物感測器之分析範圍.... 58
         3-1-4-1 實驗方法................................................................. 58
         3-1-4-2 擴大研究電極間距對於電容大小之影響............. 59
      3-1-5 設定電極厚度對於指叉式電容生物感測器之分析範圍.... 60
         3-1-5-1 實驗方法................................................................. 60
         3-1-5-2 擴大研究電極厚度對於電容大小之影響............. 61
      3-1-6 設定電極交叉長度對於指叉式電容生物感測器之分析範圍
    .................................................................................................................. 62
         3-1-6-1 實驗方法................................................................ 62
         3-1-6-2 擴大研究電極交叉長度對於電容大小之影響.... 63
      3-1-7 ADS模擬軟體之簡介與設計步驟........................................ 64
         3-1-7-1 ADS模擬軟體之簡介............................................. 64
         3-1-7-2 ADS軟體模擬之設計步驟..................................... 67
    3-2 指叉式電容感測器進行最佳化分析............................................... 72
      3-2-1實驗背景................................................................................. 72
      3-2-2實驗目的................................................................................. 74
      3-2-3實驗方法與步驟..................................................................... 74
      3-2-4田口設計分析實驗................................................................. 82
    第四章 實驗結果與討論......................................................................... 86
    4-1指叉式電極之單一幾何參數與電容大小之設計範圍.................... 86
      4-1-1 指叉式電極寬度與電容大小之實驗結果............................ 86
      4-1-2 指叉式電極間距與電容大小之實驗結果............................ 89
      4-1-3 指叉式電極厚度與電容大小之實驗結果............................ 91 
      4-1-4 指叉式電極交叉長度與電容大小之實驗結果.................... 94 
      4-1-5 指叉式電極幾何參數之設計範圍與討論............................ 96 
    4-2指叉式電容感測器最佳化分析結果與討論.................................... 103
      4-2-1田口分析法之因子效應分析與最佳化預測......................... 103
      4-2-2指叉式電容感測器進行最佳化之分析討論......................... 107
    4-3 考慮現有製程設計之討論............................................................... 111
    4-4 加上生物待測物之靈敏度比較....................................................... 113
      4-4-1實驗方法................................................................................. 113
      4-4-2 實驗結果................................................................................ 114
    4-5 指叉式電容性生物感測器用於實際應用之分析比較................... 120
    4-5-1實驗方法................................................................................. 121
      4-5-2 實驗結果................................................................................ 122
    第五章 結論與未來展望......................................................................... 127
    5-1 結論.................................................................................................... 127
    5-2 未來展望............................................................................................ 129
    參考文獻................................................................................................... 130
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  • Jang-Zern Tsai(蔡章仁)
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    Date of Submission 2011-08-26

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