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Student Number 963204014
Author Ciou-Nan Siao(蕭秋男)
Author's Email Address 963204014@cc.ncu.edu.tw
Statistics This thesis had been viewed 688 times. Download 815 times.
Department Chemical and Materials Engineering
Year 2008
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title In situ Measurement of Stress Evolution in Tin Strip under Electromigration by Synchrotron X-ray Diffraction
Date of Defense 2009-07-14
Page Count 48
Keyword
  • electromigration
  • stress
  • synchrotron
  • Abstract This investigation elucidates stress evolution in situ in tin strips under electromigration using synchrotron radiation X-ray. Minute variations in stress are measured precisely using intense X-rays. Back stress that is induced by electromigration was directly measured. The effective diffusivities at various current densities were calculated. The effect of Joule heating was observed and the increase in temperature was calculated. The protective oxide layer on the surfaces is considered to influence critically the kinetics of stress evolution. The morphology of tin strips after electromigration was observed.
       Electromigration induced stress gradients are about 5.5 MPa/cm with current density of 1×103 A/cm2 and 16.5 MPa/cm with current density of 5×103 A/cm2 at 100°C. The evaluate increases in temperature by Joule heating is approximately 15°C. The diffusivity of Sn with current density of 1×103 and 5×103 A/cm2 at 100°C has been calculated to be 6.01×10-14 and 6.01×10-14 m2/s. Voids form at the cathode and hillocks form at the anode in the prolonged test of electroigration.
    Table of Content 摘要................................................................................................................................I
    Abstract ........................................................................................................................ II
    目錄.............................................................................................................................. III
    圖目錄........................................................................................................................... V
    表目錄........................................................................................................................ VII
    第一章 序論 ................................................................................................................. 1
    1.1 研究背景..................................................................................................... 1
    1.2 研究動機..................................................................................................... 3
    第二章 文獻回顧 ......................................................................................................... 5
    2.1 電遷移理論................................................................................................. 5
    2.1.1 電遷移的驅動力 ............................................................................... 5
    2.1.2 電遷移的臨界電流和臨界長度 ....................................................... 7
    2.1.3 電遷移的背向應力 ........................................................................... 9
    2.2 電遷移導線應力的量測........................................................................... 12
    2.2.1 鋁導線的應力量測 ......................................................................... 12
    2.2.2 鋁(銅)導線的應力量測................................................................... 13
    2.3 同步輻射簡介........................................................................................... 15
    第三章 實驗方法 ....................................................................................................... 16
    3.1 試片製作................................................................................................... 16
    3.1.1 絕熱層的生長 ................................................................................. 16
    3.1.2 微影蝕刻 ......................................................................................... 16
    3.1.3 薄膜鍍製 ......................................................................................... 17
    3.1.4 電鍍錫 ............................................................................................. 17
    3.2 試片處理................................................................................................... 19
    3.2.1 退火(Annealing) .............................................................................. 19
    3.2.2 拋光 ................................................................................................. 19
    3.3 電遷移實驗............................................................................................... 20
    3.4 試片分析................................................................................................... 21
    3.4.1 光學顯微鏡 ..................................................................................... 21
    3.4.2 電子顯微鏡 ..................................................................................... 21
    3.4.3 電子背向散射繞射 ......................................................................... 22
    3.4.4 八環X光繞射儀 ............................................................................ 22
    第四章 結果與討論 ................................................................................................... 23
    4.1 電鍍錫的優選方向................................................................................... 23
    4.2 初期的電遷移效應................................................................................... 25
    4.2.1 微結構的變化 ................................................................................. 25
    4.2.2 應力的分析與測量 ......................................................................... 27
    4.2.3 焦耳熱效應 ..................................................................................... 32
    4.2.4 擴散係數 ......................................................................................... 33
    4.3 長時間的電遷移效應............................................................................... 38
    4.3.1 微結構的變化 ................................................................................. 38
    4.4 正逆方向通電的電遷移效應................................................................... 42
    第五章 結論 ............................................................................................................... 46
    參考文獻...................................................................................................................... 47
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    Advisor
  • Albert T. Wu(吳子嘉)
  • Files
  • 963204014.pdf
  • approve immediately
    Date of Submission 2009-07-22

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