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Student Number 962206030
Author Chao-Yuan Wu(吳肇元)
Author's Email Address johnson_letter@hotmail.com
Statistics This thesis had been viewed 952 times. Download 515 times.
Department Optics and Photonics
Year 2008
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Measurement of optical thin film constants using dynamic interferometer
Date of Defense 2008-07-03
Page Count 79
Keyword
  • dynamic interferometer
  • optical admittance
  • optical constants
  • Thin film
  • Abstract In this thesis, we proposed a polarize phase shifting interferometer based on Twyman-Green interferometer structure which is used to measure the thin film optical admittance, and the refractive index and thickness of single layer thin film can be derived directly; moreover, the refractive index and thickness of multilayer thin film can be solved by numerical fitting method.
    In our arrangement, the low coherence light source is composed of a halogen lamp, which is a polychromatic light source and covering the visible spectral range, and a choosable narrow band pass filter, which is used to create a Gaussian power spectral density source, and achromatic phase shifter are need to this multi-wavelength measurement.
    As a polarization interferometer, a novel pixelated mask with a micro-polarizer phase shifting array are placed just prior to the CCD, so that we can use single interferogram to extract phase information and that’s effective in reducing environmental vibration.
    The measurement results were compared with the results obtained by ellipsometer. The results meet reasonable values in both refractive index and thickness.
    Table of Content 目錄
    摘要I
    AbstractII
    致謝III
    圖目錄VII
    表目錄IX
    第一章前言1
    第二章基礎理論4
    2-1 垂直入射之光學導納4
    2-1-1 光學導納定義4
    2-1-2 單介面穿透與反射7
    2-1-3 單層膜的等效導納與膜矩陣9
    2-1-4 多層膜的反射與透射12
    2-1-5 非相干性之反射與透射13
    2-2 相移干涉原理16
    2-2-1 波的干涉原理16
    2-2-2 相移干涉術19
    2-2-3 消色差相移法21
    2-2-4 波片組Jones矩陣計算22
    第三章光學常數的量測法29
    3-1 光度法30
    3-1-1 Abeles法30
    3-1-2 包絡法33
    3-2 橢圓偏極術36
    3-2-1 偏極態光波理論36
    3-2-2 橢圓參數之定義38
    第四章實驗儀器與架構42
    4-1 實驗架構42
    4-2 相位分析方法46
    4-3 量測步驟與結果討論52
    4-3-1 相移量測步驟52
    第五章量測結果與討論56
    5-1 量測結果56
    5-2 結果討論61
    第六章結論62
    Conclusion63
    參考文獻64
    圖目錄
    圖 2.1 電場、磁場、波向量之關係圖6
    圖 2.2 光波由介質0垂直入射到介質18
    圖 2.3 基板Ns上鍍一層厚度為d折射率為N的薄膜9
    圖 2.4 a、b界面之等效導納11
    圖 2.5 多層膜等效原理12
    圖 2.6 基板兩面穿透反射圖14
    圖 2.7 Fizeau干涉儀18
    圖 2.8 Twyman-Green干涉儀18
    圖 2.9 (a)移動PZT產生相移 (b)旋轉檢偏器產生相移21
    圖 2.10 消色差相移波片組22
    圖 2.11 兩種波片組合相對於相位延遲隨波長的改變27
    圖 3.1 Abeles 法求薄膜折射率30
    圖 3.2 弱吸收薄膜在透明基板之示意圖35
    圖 3.3 單層膜弱吸收之光譜圖,虛線為光譜知包絡線,假設n>ns35
    圖 3.4 橢圓偏極光38
    圖 3.5 薄膜內部多次反射40
    圖 4.1 實驗架構圖43
    圖 4.2 偏極陣列示意圖44
    圖 4.3 光源於待測樣品之反射圖47
    圖 4.4 使用檢偏器使參考光與待測光產生相移47
    圖 4.5 取九個像素計算薄膜相位49
    圖 4.6 NI LabVIEW 軟體操作介面53
    圖 4.7 入射均勻無偏極光線,CCD影像修正前後之比較54
    圖 4.8 消色差相移法量測流程圖55
    圖 5.1 量測樣本10次相位圖(at 633nm)57
    圖 5.2 相位剖面、橫截面及折射率圖(at 633nm)57
    圖 5.3 二維折射率分佈圖59
    圖 5.4 二維薄膜表面輪廓圖(單位:nm)60
    表目錄
    表 1-1 光學常數量測法比較2
    表 2-1 各波長對應之振幅與相位差26
    表 4-1 量測系統的光學元件表45
    表 5-1 量測波長633nm的Ta2O5薄膜折射率與厚度58
    Reference 參考文獻
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    [10] Zhang, T., & Yamaguchi, I., “Three-dimensional microscopy with phase-shifting digital holography”. Opt. Let., 23, p1221~1223, 1998.
    [11] Creath, K., “Phase-Measurement Interferometry Technique,” in Progress in Optics. Vol. XXVI, E. Wolf, Ed., Elsevier Science Publishers, Amsterdam, 349-393,1988.
    [12] Wyant, J. C., “Interferometry optical metrology: basic principles and new systems,” Laser Focus, 65–71,1982.
    [13] Hariharan, P., Oreb, B. F., and Eiju, T., ‘’Digital Phase-Shifting Interferometry: a Simple Error-Compensating Phase Calculation Algorithm,” Appl. Opt. 13, 2504,1987.
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    [17] Yuuki Watanabe, Yasuhiro Hayasaka, Manabu Sato, and Naohiro Tanno,”Full-field optical coherence tomography by achromatic phase shifting with a rotating polarizer”, APPLIED OPTICS , 44, 8,2005.
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    [19] Abeles F., “Methods for determining optical parameters of thin films”, in Progress in Optics, Vol. 2, Chap. VI, ed. by Wolf E., North-Holland Publishing Company, 251-288, 1963.
    [20] Manifacier J.C., Gasiot J. and Filland J.P., “Simple method for determination of the optical constant n, k and the thickness of weekly absorbing thin films”, J. Phy. E. : Sci. Inst. 9, 1002-1004,1976.
    [21] Swanepoel R., “Determination of the thickness and optical constant of amorphous silicon”, J. Phy. E.: Sci. Inst. 16, 1214-1222, 1983.
    [22] Edward Collett, “POLARIZED LIGHT,” Marcel Dekker, Inc.cptl and pp21-89, 1993.
    [23] 林奕德,"數值分析簡式橢偏儀中的偏光片及析光片之校正及更正",國立交通大學光電所碩士班論文,2005 .
    [24] Millerd, J. E., “Fringe 2005,” edited by W. Osten, pg 640, 2005.
    [25] 馬聖茹, 茹膜堆光學導納量測儀”堆光國立中央大學光電所碩士班論文,2008.
    Advisor
  • Cheng-Chung Lee(李正中)
  • Sheng-Hui Chen(陳昇暉)
  • Files
  • 962206030.pdf
  • approve in 2 years
    Date of Submission 2009-07-21

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