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Student Number 952206030
Author Sheng-Ju Ma(馬聖茹)
Author's Email Address daisy1@ms50.url.com.tw
Statistics This thesis had been viewed 1285 times. Download 11 times.
Department Optics and Photonics
Year 2007
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title System for Measuring Optical Admittance of a Thin Film Stack
Date of Defense 2008-07-01
Page Count 56
Keyword
  • Optical admittance
  • Optical constant
  • Polarization interferometer
  • Thin film
  • Abstract A new method based on polarization interferometry is demonstrated. An optical system is built to obtain the phase and magnitude of reflection coefficient, as well as the optical admittance at normal incidence. We use Twyman Green interferometer to induce phase difference between two beams which have orthogonal polarizations and the Fizeau cavity makes interference happen.
    The refractive index and thickness of single layer thin film can be analytically found without numerical fitting. In addition,, we can use numerical fitting to get the refractive and index, thickness for multilayer film stack.
      In this article, the validity of the above characteristics will be examined theoretically and experimentally. There are two parts in this study. The first part of the experiments is the framework and discussion and the second part is the second kind of framework and experimental results.
    Table of Content 目錄
    摘要2
    Abstract3
    第一章前言1
    第二章基礎理論4
    2.1 晶體光學[7][8]4
    2.1.1 光的偏振4
    2.1.2 偏振元件之作用7
    2.2 移相干涉術原理[2][8]12
    2.2.1 波的干涉原理12
    2.2.2 移相干涉原理15
    2.3 垂直入射之光學導納17
    2.3.1 光學導納定義[14]17
    2.3.2 單介面穿透與反射18
    2.3.3 單層膜的等效導納與反射率19
    2.3.4 多層膜的反射與透射22
    2.3.5 非相干性之反射與透射24
    第三章第一部分實驗26
    3.1光學導納測量儀26
    3.1.1 實驗架構26
    3.1.2操作原理27
    3.2 樣品製作31
    3.3 實驗結果33
    3.4 討論35
    第四章第二部份實驗架構之改良36
    4.1改良型光學導納測量儀36
    4.1.1實驗架構36
    4.1.2 操作原理37
    4.1.3 實驗結果39
    4.2 誤差分析41
    第五章結論43
    Conclusion44
    第六章未來工作45
    參考資料46
    Reference 1.Gupta, M.C., “Optical constant determination of thin films”, Applied Optics, 51, p.954-956, 1988.
    2.蕭家鼎, “以模擬退火法推算薄膜之光學常數”,國立中央大學光電科學研究所碩士班論文, 2005.
    3.楊惠婷, “垂直入射移相干涉術測量物體二維階高及折射率分佈”, 國立交通大學光電所碩士班論文, 2006.
    4.Brock, N; Hayes, J; Kimbrough, B.; Millerd, J.; North-Morris, M.; Novak, M. & Wyant, J., “Dynamic interferometry”, Proc. SPIE Int. Soc. Opt. Eng., 5875, 1, 58750F, 2005.
    5.Kimbrough, B.; Millerd, J.; Wyant, J. & Hayes, J., “Low Coherence Vibration Insensitive Fizeau Interferometer”, Proc. of SPIE Vol, 6292, 62920F-1
    6.Francon, M. & Mallick, S., “Polarized Interferometer”, Wiley, New York, 1971.
    7.Amnon Y. & Pochi Y., “Optical Waves in Crystals”, Mei Ya, Taipei, p.54~65, 1983.
    8.張弘, “幾何光學”, 東華書局, 台灣, p148~p189, 1987.
    9.Hecht, E. & Zajac, A., “Optics”, Addison-Wesley, p431~434, 1979.
    10.Malacara, D., “Optical shop testing”, Wiley, New York, p18~p30, 1997.
    11.Zhang, T., & Yamaguchi, I., “Three-dimensional microscopy with phase-shifting digital holography”. Opt. Let., 23, p1221~1223, 1998.
    12.Hariharan, P., Oreb, B. F. & Eiju, T., “Digital Phase-Shifting Interferometry: A Simple Error-Compensating Phase Calculation Algorithm”, Appl. Opt., 26, p2504~2506, 1987.
    13.李正中, “薄膜光學與鍍膜技術”, 第四版, 藝軒出版社, 台灣, 2004.
    14.Helen, S.S.; Kothiyal, MP & Sirohi, RS, “Achromatic phase shifting by a rotating polarizer”, Opt.Commun., 154, 5-6, p249~254, 1998.
    15.Helen, S.S.; Kothiyal, MP & Sirohi, RS, “Phase shifting by a rotating polarizer in white-light interferometry for surface profiling”, Journal of Modern Optics, 46, 6, p993~1001, 1999.
    Advisor
  • Cheng-Chung Lee(李正中)
  • Sheng-Hui Chen(陳昇暉)
  • Files
  • 952206030.pdf
  • disapprove authorization
    Date of Submission 2008-07-18

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