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Student Number 93521063
Author An-Cheng Shiao(蕭安成)
Author's Email Address challengershoter@yahoo.com.tw
Statistics This thesis had been viewed 2994 times. Download 1947 times.
Department Electrical Engineering
Year 2006
Semester 1
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Evanescently-Coupled Dual-Depletion-Region Traveling-Wave Electroabsorption Modulator with High-Speed(>40GHz) and Low-Driving-Voltage(<2V) Performance
Date of Defense 2006-12-08
Page Count 72
Keyword
  • electroabsorption modulator
  • modulator
  • Abstract We demonstrate a novel structure of traveling-wave electro-absorption modulator (EAM) at a 1.55um wavelength. By incorporating the epi-layer structure of Dual-Depletion-Region Electro-Absorption Modulator (DDR EAM) with an evanescently-coupled optical waveguide and the traveling-wave electrodes, the demonstrated device can achieve low electrical return loss (-20dB at ~60GHz), wide 3-dB bandwidth (60GHz) of electrical transmission loss, wide electrical-to-optical (EO) bandwidth (45GHz), and low 20dB driving-voltage (V20dB, 1.65V) with extremely low polarization dependency. This new structure can not only achieve excellent figures-of-merit but release the burden imposed on downscaling the core width or length of high-speed/low driving-voltage EAM without using epitaxial re-growth or ion-implantation techniques to isolate the active and passive regions.
    Table of Content 目錄. . . . . . . . . . . . . . . . . . . . . . . . . . Ⅰ
    圖目錄. . . . . . . . . . . . . . . . . . . . . . . . .Ⅲ
    表目錄. . . . . . . . . . . . . . . . . . . . . . . . .Ⅵ
    第一章、導論
    􀁺 1.1 光纖通訊之發展趨勢及其應用. . . . . . . . . . . . .1
    􀁺 1.2 信號源的直接調變與間接(外部)調變. . . . . . . . . .3
    􀁺 1.3 致電-吸收光調制器 VS. 電-光調制器. . . . . . . . . .4
    􀁺 1.4 行波式調制器VS. 集總式調制器. . . . . . . . . . . .7
    􀁺 1.5 論文架構 . . . . . . . . . . . . . . . . . . . . .9
    第二章、雙空乏區致電-吸收光調制器研究動機、設計與模擬
    􀁺 2.1 致電-吸收光調制器原理介紹. . . . . . . . . . . . . .10
    􀁺 2.1.1 載子躍遷 . . . . . . . . . . . . . . . . . . .10
    􀁺 2.1.2 量子侷限史塔克效應. . . . . . . . . . . . . 10
    􀁺 2.2 雙空乏區消逝波波導致電-吸收
    光調制器研究動機及設計. . . . . . . . . . . . . .12
    􀁺 2.3 量子井之模擬設計. . . . . . . . . . . . . . . . . . .19
    􀁺 2.4 光波導之設計與模擬. . . . . . . . . . . . . . 24
    第三章、元件製作概說與詳細製程步驟
    􀁺 3.1 元件製作概說 . . . . . . . . . . . . . . . . . 32
    􀁺 3.2 晶片研磨與劈裂. . . . . . . . . . . . . . . . . 35
    􀁺 3.3 DDR EAM製作流程. . . . . . . . . . . . . . . 38
    第四章、量測系統與量測結果分析
    􀁺 4.1 量測系統. . . . . . . . . . . . . . . . . . . . 49
    􀁺 4.2 量測結果. . . . . . . . . . . . . . . . . . . . 51
    􀁺 4.2.1 二極體特性. . . . . . . . . . . . . . . . . .51
    􀁺 4.2.2 元件特性的初步驗證. . . . . . . . . . . . . 51
    􀁺 4.2.3 DDR EAM 元件特性. . . . . . . . . . . . . 52
    􀁺 4.3 電容特性驗證. . . . . . . . . . . . . . . . . . 57
    􀁺 4.4 Figure of merit 的計算. . . . . . . . . . . . . . . 61
    第五章、結論
    􀁺 5.1 總結. . . . . . . . . . . . . . . . . . . . . . 62
    􀁺 5.2 未來之研究方向. . . . . . . . . . . . . . . . . 63
    參考資料. . . . . . . . . . . . . . . . . . . . . . . . . .64
    附錄A 量子井模擬Matlab . . . . . . . . . . . . . . . . 70
    著作列表. . . . . . . . . . . . . . . . . . . . . . . . . .72
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    Advisor
  • J.-W. Shi(許晉瑋)
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    Date of Submission 2007-01-02

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