Title page for 93433028


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Student Number 93433028
Author Chun-Ling Wang(王俊凌)
Author's Email Address No Public.
Statistics This thesis had been viewed 2054 times. Download 11 times.
Department Executive Master of Information Management
Year 2005
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Design and Implementation of an Advanced Semiconductor Run-to-Run Process Control System
Date of Defense 2006-06-27
Page Count 105
Keyword
  • Advanced Process Control
  • CIM
  • Object Oriented Systems
  • Run-to-Run
  • UML
  • Abstract When the semiconductor process migrates to the Ultra Large Scale Integration (ULSI) technology and most manufacturers are using similar manufacturing techniques and equipment, this industry has become highly standardized and cost driven with high productivity. All of these factors from time to time result in oversupply and seriously hurt the selling prices of the chips. 
     If the chip manufactures want to be profitable from this under-priced situation, in addition to lower down the overall manufacturing cost, a strict process control to minimize or eliminate the out-of-spec products becomes another critical area. The so-called Run-to-Run (R2R) control in Advanced Process Control (APC) is a solution for this purpose. It has the function to monitor the health of the chosen process and is able to adjust the process parameters to further improve the process capability.
     
    The purpose of this research is to present a R2R system design that it has the advantages as shown below:
    1. The system architecture is developed under the foundation of Object-Oriented
    Software Engineering Technology and the blueprint of Advanced Process Control
    Framework Initiative (APCFI). This architecture allows for further development and extension with ease.
    2. The technology of Web Service used in this architecture can replace the Common Object Request Broker Architecture (CORBA) platform to facilitate the integration and interaction among heterogeneous systems and components from different platforms. It not only equips the function of CORBA for handling Distributed Objects but also helps on cost down. It is also user friendly. 
    3. More importantly, this universal architecture can support different unit processes and is highly modulized. It can be applied to many process tools or CIM system.
    Table of Content [論文目次]
    中 文 摘 要 …………………………………………………………………… ii
    英 文 摘 要 …………………………………………………………………… iii
    謝 詞 …………………………………………………………………………… v
    目 錄…………………………………………………………………………… vi
    圖 目 錄………………………………………………………………………… viii 
    表 目 錄 …………………………………………………………………………ix 
    第一章 緒論 …………………………………………………………………… 1 
    1.1 研究動機與問題 ……………………………………………………… 1
    1.2 研究目的 ……………………………………………………………… 2
    1.3 研究方法 ……………………………………………………………… 3
    1.4 論文架構 ……………………………………………………………… 3
    第二章 文獻探討 ……………………………………………………………… 4
    2.1 SEMATECH先進製程控制初始架構簡介 (Advanced Process Control
        Framework Initiative 1.0) ……………………………………………… 4
    2.1.1 APCFI簡介 …………………………………………………… 4
    2.1.2 APCFI物件 …………………………………………………… 5
    2.2 物件導向軟體工程 ……………………………………………………10
    2.2.1 軟體工程簡介 ………………………………………………… 10
    2.2.2 軟體工程開發步驟 …………………………………………… 12
    2.2.3系統設計…………………………………………………………13
    2.2.4軟體開發專案管理 ……………………………………………. 14
    第三章 R2R系統分析 ………………………………………………………… 15
    3.1 系統概述 ……………………………………………………………… 15
      3.2 系統控制作業分析 …………………………………………………… 17
    3.3 R2R系統與MES系統運作分析 ………………………………………19
      3.4 控制模式分析 ………………………………………………………… 24
    3.5 R2R控制器參數設定分析 …………………………………………… 28
      3.6一致性的架構 ………………………………………………………… 31
      3.7 系統使用案例分析…………………………………………………… 32
    第四章 R2R系統設計與雛型實作 …………………………………………… 37 
    4.1 軟體設計 ………………………………………………………………37
    4.2 系統物件設計 …………………………………………………………40
    4.3 系統介面流程 ………………………………………………………… 50
    4.4 硬體架構設計 ………………………………………………………… 59 
    4.5 系統導入與整合 ……………………………………………………… 62
      4.6 雛型系統實作-以CMP製程為例 …………………………………… 65
      4.6.1 CMP製程簡介 ……………………………………………………65
    4.6.2雛型系統開發與成效探討 ……………………………………… 66
    第五章 結論與未來發展 ………………………………………………………… 68
    5.1 本研究之成果與探討 …………………………………………………… 68
    5.2 管理意涵 ………………………………………………………………… 68
    5.3 研究限制 ………………………………………………………………… 69
    5.4 未來發展 ………………………………………………………………… 69
    參考文獻 ………………………………………………………………………… 71
    附錄一  STICMP-R2R使用者圖形化操作介面 ……………………………… 72
    附錄二  R2R Project Work Breakdown Schedule (WBS) ………………………92
    Reference 1.Tony, Mullins, “Advanced Process Control Framework Initiative (APCFI) 1.0 Specifications”, Technology Transfer #97063300A-ENG SEMATECH, June 30, 1997
    2.Michael, L.Miller, “Using Tcl to Script CORBA Interactions in a Distributed System”, Sixth Annual Tcl/Tk Workshop San Diego, California, September, 14–18, 1998
    3.Alan, Weber, “Taking Control with the APC (Advanced Process Control) Framework”, Future Fab Intl. Volume 9, Janu, 1, 2000
    4.SEMATECH, “Provisional Specification for CIM Framework Advanced Process Control Component”, Semi E93-0200, Sept, 1999
    5.SEMATECH, “Provisional Specification for CIM Framework Domain Architecture”, Semi E81-0600, June, 1999
    6.SEMATECH, “Provisional Specification for Automated Process Control System Interface”, Semi E133-0704, July, 2004
    7.SEMATECH, “Provisional Specification for Automatic Recipe Transfer To Wafer Exposure System”, Semi P42-0304, March, 2004
    8.SEMATECH, “Provisional Specification for Equipment Data Acquisition Solutions”, Semi P42-0304, March 2003
    9.Toprac, Anthony and Campbell, W. Jarrett, “The status and future of APC software”, Solid State Technology, May, 2002
    10.SEMATECH, “Advanced Process Control Framework Initiative (APCFI) Proposal Summary and Plan”, Technology Transfer # 96093181A-ENG, September 30, 1996 
    11.Edward, Lin, “Thickness Control of Oxide CMP Process Utilizing FF and FB Strategy”, Inotera Memories, Inc., December, 2005 
     
    12.SEMATECH, “Advanced Process Control Framework Initiative (APCFI) 1.0 Project Overview”, SEMATECH, Technology Transfer #99053735A-TR, June 30, 1999
    Advisor
  • Yea-Huey Su(蘇雅惠)
  • Ruey-Shan Andy Guo(郭瑞祥)
  • Files
  • 93433028.pdf
  • disapprove authorization
    Date of Submission 2006-07-17

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