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Student Number 93394013
Author Jun-Wei Zhong(鍾俊瑋)
Author's Email Address No Public.
Statistics This thesis had been viewed 2202 times. Download 1092 times.
Department Chemical and Materials Engineering
Year 2006
Semester 1
Degree Master
Type of Document Master's Thesis
Language English
Title 3D Analysis on Via and Contact by Using Tomography
Date of Defense 2006-12-21
Page Count 65
Keyword
  • TOMOGRAPHY
  • Abstract Tomography is a well-established technique for three dimensional structure determination amorphous specimens in life sciences applications; Semiconductor device size is diminished in recent year, it is difficult to explain complicated structure by two-dimension image. For this reason, it is advantage for tomography used in fault analysis.
    Tomography consist of image acquisition、image alignment and image reconstruction. Cross-Collection and Feature Tracking are two methods in image alignment. Alignment well or not can influence with three-dimension image quantity seriously.
    In the Feature Tracking, the gold particle number and distribution are two important factors in alignment quality. Therefore, in the first experiment, using different concentration of gold particle suspension adhere on the carbon film, and watching gold particles distribution situation.
    Experiment results show large range of pollutants on carbon film, and therefore can not acquire gold distribution image, because of buffer solution in gold particle suspension contains twenty percentages glycerol. We decide to change another suspension only consists gold and water, and we get clear and uniform distribution gold image by using this suspension.
    In Cross-Correlation experiment, well high pass filter and low pass filter parameters can make Cross-Correlation peak clear and sharp; the shift between image and above image can be reduced by well alignment.
    The software used in this experiment is Inspect 3D made by FEI company, we set high pass filter up 0.01, 0.03, 0.05, 0.07 and 0.09 in low pass filter 0.1, 0.3, 0.5, 0.7 and 0.9. Compare effect of alignment by changing parameters which is the best in twenty-five sets in TEM and STEM modes.
    After experiment, we find high pass filter 0.09 in low pass filter 0.5 has the best TEM image alignment in twenty-five sets, and high pass filter 0.03 in low pass filter 0.1 has the best STEM image alignment in twenty-five sets.
    Table of Content Contents…………………………………………………………….............I
    List of Figures…………………………………………………………….III
    List of Tables…………………………………………………………….VII
    List of Equations………………………………………………………..VIII
    Chapter 1 Introduction
    1.1Introduction of Electron Tomography…………………..........1
    1.2Tomography Acquisition……………………………………..6
    1.3Tomography Acquisition Software…………………………...8
    1.4 Tomography Alignment and Reconstruction………………..12
    1.4.1 Tomography Data Alignment………………………...12
    1.4.2 Tomography Reconstruction………………………….15
    1.5 Tomography Resolution…………………………...….……..18
    1.6 Tomography Artifacts……………………………………….19
    1.7 Objectives…………………………………………………...21
    Chapter 2 Experimental Instruments…………………………..…..……..23
    2.1 Focused Ion Beam ………………………………………….23
    2.1.1 Introduction…………………………………………...23
    2.1.2 Focus………………………………………………….24
    2.1.3 Ion…………………………………………………….24
    2.1.4 Image Principle…………………………………….....25
    2.1.5 Outline of FIB System………………………………..25
    2.2 Transmission Electron Microscopy………………………….26
    2.2.1 TEM History……………………………………….....26
    2.2.2 The Reaction between Electron Beam and Material.....30
    2.2.3 TEM Structure………………………………………...30
    Chapter 3 Experimental…………………………………………………..32
    3.1 Gold Adherence Test………………………………………...32
    3.2 Image Alignment Parameter Test……………………………33
    3.2.1 M-Bond…………………………………………….....34
    3.2.2 FIB Cutting……………………………………………34
    3.2.3 Lift Out Sample……………………………………….38
    3.2.4 Acquire TEM/STEM Image………………………......41
    3.2.5 Image Alignment……………………………………...42
    Chapter 4 Experiment Results and Discussion…………………………...45
    4.1 Gold Adherence Ability on Carbon Test…………………......45
    4.1.1 Protein A Gold Suspension Test………………………45
    4.1.2 The Gold in Aqua Suspension Test…………………...49
    4.2 3D Software Parameter Test………………………………...51
    4.2.1 TEM CB 3D Software Parameter Test……………......51
    4.2.2 STEM CB 3D Software Parameter Test……………...57
    Chapter 5 Calculation…………………………………………………….64
    Chapter 6 References……………………………………………………..A
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    Advisor
  • Cheng-Yi Liu(劉正毓)
  • C. R. Kao(高政宏)
  • Files
  • 93394013.pdf
  • approve in 1 year
    Date of Submission 2007-01-16

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