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Student Number 93327008
Author Pei-Fu Kao(高培復)
Author's Email Address No Public.
Statistics This thesis had been viewed 1637 times. Download 11 times.
Department opto-Mechatronics
Year 2005
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title 微電鍍成長速度最佳化與影像監控
Date of Defense 2006-07-03
Page Count 77
Keyword
  • 3D micro-structure
  • localized electro-deposition
  • MAGE
  • micro-anode guided electroplating
  • micro-fabrication
  • Abstract There are two purposes in this paper. 1.We want to find a balance point between plating time and growth time through improvement of our MAGE control system. 2.We establish the digital imaging subsystem on our original MAGE control system, and use the digital imaging subsystem to observe the growth behavior of micro electroplating. In order to reduce the plating time, we have the new idea of vibrating our anode. Our new idea can speed up convection and diffuse of ion, and reduce the plating time effectively. Our new idea not only reduces the plating time also has good quality of the metallic micro column.
    In this article, we introduce the hardware and software module of MAGE control system. We have experiments to discuss our new idea. In digital imaging subsystem, we have continuous grabbing image and image recording to discuss the growth behavior of micro electroplating.
    Table of Content 論文摘要I
    AbstractII
    致  謝III
    目  錄IV
    圖  目VII
    表  目X
    第一章緒論1
    1.1 前言1
    1.2 前案說明3
    1.3 需求說明4
    1.4 本文重要技術突破5
    1.5論文架構5
    第二章電鍍基礎理論7
    2.1 電鍍原理7
    2.1.1 一般電鍍7
    2.1.2 微陽極引導微電鍍法8
    2.1.3 影響微電鍍的因素10
    2.1.4 電雙層效應11
    2.2 微電鍍等效電路12
    2.3 以陽極振動增加對流加速擴散13
    第三章系統架構16
    3.1 系統目的16
    3.2 系統架構16
    3.3 系統規格列表19
    3.4 各模組簡介20
    3.4.1 人機介面20
    3.4.2 電源供應與量測模組21
    3.4.3 微步進馬達與微步進驅動模組22
    3.4.4 影像擷取模組24
    3.5 控制介面卡27
    3.5.1 AD/DA/DIO卡27
    3.5.2 運動控制卡28
    3.5.3 影像擷取卡30
    第四章軟體設計32
    4.1 程式功能與目的說明32
    4.2 微電鍍監控程式檔案結構33
    4.2.1 讀入檔案結構33
    4.2.2 輸出檔案結構36
    4.3 程式介面說明37
    4.3.1 電鍍監控部分37
    4.3.2 影像監控部分39
    4.4 程式流程41
    第五章實驗數據與討論42
    5.1前言42
    5.2實驗設置42
    5.1.1 實驗器材準備42
    5.1.2 實驗流程44
    5.1.3 鍍液配置與實驗環境45
    5.2 實驗結果與討論46
    5.2.1 定時觸發法46
    5.2.2 電流門檻觸發法53
    5.2.3 改變振動次數61
    5.2.4 改變振動距離64
    5.3 影像擷取系統擷圖67
    5.3.1 影像擷取系統連續擷圖67
    5.3.2 初始生長情況擷圖69
    第六章結論72
    6.1 本文貢獻72
    6.2未來方向72
    參考文獻74
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    [21] 鄧振宏, “3D陽極引導微電鍍系統開發”, 國立中央大學機械工程研究所碩士論文, 2005。
    [22] 川崎原雄等六人編著, 呂政峰編譯,“電鍍學”, 世一書局, 1993。
    [23] Lubomry T. Romankiw “Electrodeposition technology theory and practice” IBM T. J. Watson Research Centrt Yorktown Heights, New York, 1986, pp.425-565
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    [25] 田福助編著, “電化學理論與應用”, 五洲出版社, 1997。
    [26] 張庭綱, “微陽極引導微電鍍法製作微銅柱及銅柵欄之研究”, 國立中央大學碩士論文, 2004。
    Advisor
  • Shyh-Biau Jiang(江士標)
  • Tse-Liang Yeh(葉則亮)
  • Files
  • 93327008.pdf
  • disapprove authorization
    Date of Submission 2006-07-11

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