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Student Number 93323084
Author Chih-Jen Tsang(臧志仁)
Author's Email Address 93323084@cc.ncu.edu.tw
Statistics This thesis had been viewed 1563 times. Download 1286 times.
Department Mechanical Engineering
Year 2005
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Using Interferometer to Control Axial Position in Confocal Microscope
Date of Defense 2006-07-10
Page Count 91
Keyword
  • Confocal microscope
  • Fuzzy slidi
  • Interferometry
  • Abstract In thesis , A differential co confocal microscopy, which with a fuzzy controller for suppressing the longitudinal disturbance of scanner in confocal microscopy, was developed. The system use Michelson interferometer as position control sensor. The experimental result shows that the fuzzy controller is effective in 12dB of the longitudinal disturbance suppression. And the system's position error is within 25nm.
    The experimental result shows that the slop of the intensity versus longitudinal displacement (SILD) curve is enhanced to 2.03/?m. To consider 0.3% noise in the system, a depth resolution as high as 4 nm has been achieved. A al-coating step height was measured. According to the difference of intensity and the SILD, a 369.4 nm step height was obtained.
    Table of Content 中文摘要………………………………………………………………I
    英文摘要………………………………………………………………II
    致謝…………………………………………………………………III
    目錄…………………………………………………………………….IV
    圖目錄………………………………………………………………..VIII
    表目錄………………………………………………………………..X
    第一章 諸論……………………………………………………………1
       1-1前言…………………………………………………………1
       1-2研究動機與目標……………………………………………2
       1-3文獻回顧……………………………………………………4
       1-4論文架構……………………………………………………6
    第二章 共焦顯微鏡掃描平臺軸向定位設計原理……………………7
       2-1共焦顯微術…………………………………………………7
    2-2雷射干涉儀定位控制系統架構……………………………13
    2-3共焦顯微鏡及掃描平臺定位系統架構……………………17
      2-3-1 系統元件規格…..……………………………20
      2-3-2 掃描系統……………………………………..22
    第三章 控制系統原理與方法…………………………………………25
    3-1 模糊滑動控制架構………………………………………26
    3-2 滑動平面規劃……………………………………………27
    3-2-1 滑動模態控制理論…………………………………27
    3-2-2 滑動條件……………………………………………30
    3-2-3 等效控制……………………………………………30
    3-2-4 迫近條件……………………………………………31
    3-3 模糊控制……………………………………………………34
    3-3-1 模糊控制系統架構…………………………………34
    3-3-2 定義變數……………………………………………35
    3-3-3 模糊化機構…………………………………………36
    3-3-4 模糊知識庫…………………………………………38
    3-3-5 決策邏輯……………………………………………40
    3-3-6 解模糊化機構………………………………………42
    3-3-7 參數 、 設定…………………………………43
    第四章 系統鑑別與控制模擬………………………………………44
      4-1 ARX模型……………………………………………44
    4-2 系統鑑別實驗……………………………………………51
    4-2-1 鑑別實驗裝置………………………………………51
    4-2-2 鑑別過程與結果分析………………………………52
    4-3 模糊滑動控制模擬………………………………………55
    4-3-1 模糊滑動控制器計……………………………………55
    4-3-2 控制力模擬…………………………………………57
    第五章 實驗步驟與結果討論……………………………………63
    5-1量測與控制步驟流程……………………………………63
    5-2共焦系統軸向解析力分析………………………………66
    5-3 定位控制結果分析………………………………………72
     5-3-1 軸向擾動量…………………………………………72
    5-3-2 軸向擾動定位控制…………………………………74
    5-4試片量測結果與分析……………………………………79
    第六章 結論………………………………………………………87
    參考文獻……………………………………………………………..88
    附錄一 掃描平臺系統鑑別程式……………………………………90
    附錄二 作者相關著作……………………………………………….91
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    Advisor
  • Ju-Yi Lee(李朱育)
  • Files
  • 93323084.pdf
  • approve immediately
    Date of Submission 2006-09-20

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