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Student Number 92226050
Author Yu-Chen Ting(丁于真)
Author's Email Address No Public.
Statistics This thesis had been viewed 2426 times. Download 2942 times.
Department Optics and Photonics
Year 2004
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title 氮化鎵光子晶體共振腔
Date of Defense 2005-06-16
Page Count 79
Keyword
  • GaN
  • Photonic crystal
  • resonator
  • Abstract 本論文中,以有限差分時域法與平面波展開法模擬分析氮化鎵光子晶體結構與特性,利用電子束微影技術定義出所設計尺寸,再以乾蝕刻方式將圖樣轉移至氮化鎵材料上,成功製作出氮化鎵二維光子晶體結構,在此利用二維光子晶體結構在平面上當作共振腔,有效抑制二維平面上之自發輻射,使光有效侷限於結構中缺陷的位置,並架設微光致螢光系統,量測氮化鎵二維光子晶體共振腔之光致螢光光譜,由最後結果可發現經由二維光子晶體共振腔的製作,其光致螢光光譜之譜線與未做光子晶體結構之氮化鎵光致螢光光譜譜線之明顯差異,
    在此論文中成功量得氮化鎵光子晶體之缺陷模態。在共振波長的光譜強度明顯有增益現象並且半高寬縮小至約為3nm左右。
    Table of Content 論文目錄
    ?摘要I
    ?圖目錄IV
    ?表目錄XI
    第一章 緒論1
    1.1光子晶體簡介1
    1.2光子晶體共振腔相關文獻5
    1.3研究動機與目的9
    第二章 基本原理10
    2.1平面波展開法10
    2.2有限差分時域法13
    2.3有效折射率計算方法16
    2.4光子晶體共振腔Q值計算方法19
    第三章 氮化鎵光子晶體結構設計與模擬20
    3.1有效折射率計算20
    3.2   氮化鎵光子晶體能帶結構21
    3.2缺陷模態27
    3.4   Q值計算39
    3.5   模擬結果分析49
    第四章 氮化鎵光子晶體結構製程流程與分析53
    4.1   實驗製作流程53
    4.2元件製程結果與分析56
    第五章 氮化鎵光子晶體量測與分析60
    5.1   光致螢光原理60
    5.2   量測系統架設-微光致螢光系統60
    5.3室溫量測micro PL結果與討論62
    第六章 結論與未來工作74
    參考文獻77
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    Advisor
  • Chii-Chang Chen(陳啟昌)
  • Files
  • 92226050.pdf
  • approve immediately
    Date of Submission 2005-06-29

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