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Student Number 91226031
Author Neng-Fang Yu(余能枋)
Author's Email Address fun_0117@yahoo.com.tw
Statistics This thesis had been viewed 1678 times. Download 612 times.
Department Optics and Photonics
Year 2003
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Si-based Blazed Grating for WDM System
Date of Defense 2004-07-02
Page Count 119
Keyword
  • blazed grating
  • Grismlens
  • groove
  • WDM
  • wet etching
  • Abstract   本文利用乾蝕刻或溼蝕刻等半導體製程方式,在不同材料上製作出不同角度的閃耀式光柵,本篇中將介紹四種,一、氮化矽(SiNx)薄膜穿透式閃耀光柵,二、方解石反射式閃耀光柵,三、矽(100)傾斜10o反射式閃耀光柵,四、矽45o反射式光柵,上述的四種方式可藉由調製蝕刻速率,或是改變切割晶體的角度,利用材料和溼蝕刻溶液反應的特性,製作出各種角度的光柵;另外使用半導體製程方式將更易於大量的穩定製造。
      此外,也將上述的矽45o 光柵,配合稜鏡作封裝,實際的應用至所設計的200GHz 4 channel Grismlens(稜鏡式透鏡光柵)複合式分波多工器系統中,以波長為1540∼1570nm的測試光源,配合矽分光鏡進行整體系統的光學特性量測,量測系統的插入損失為-24.25dB,在1dB單一通道帶寬達0.14nm,其中矽分光鏡的損耗-7.29dB,非球面鏡耦合至輸出光纖的效率為-2.3dB;將檢討問題所在,確定未來發展方向。
    Table of Content 目錄
    論文摘要I
    目錄II
    圖索引IV
    表索引X
    第一章 緒論1
    1.0 前言1
    1.1 光柵製作演進及比較2
    1.2 各種光纖通訊分波多工器技術發展現況12
    1.3 Grismlens(稜鏡式透鏡光柵)複合式分波多工器概念18
    第二章 相關原理簡介20
    2.1 繞射光柵介紹20
    2.2 閃耀式光柵24
    2.3 光源與光纖的耦合31
    第三章 閃耀式光柵製作35
    3.0 製作概論35
    3.1 乾蝕刻技術在氮化矽薄膜上製作穿透式閃耀光柵37
    3.2 濕式蝕刻在方解石基板上製作閃耀式光柵45
    3.3濕式蝕刻在特殊切割的矽基板上製作閃耀式光柵50
    3.4濕式蝕刻在矽基板上製作45o groove55
    第四章 閃耀式光柵模擬及光學量測72
    4.0 前言72
    4.1 氮化矽薄膜灰階光柵74
    4.2 矽(100)傾斜10o基板閃耀式光柵77
    4.3 矽基板45o groove79
    第五章 Grismlens複合式分波多工器系統86
    5.0 前言86
    5.1 Grismlens複合式分波多工器系統之設計概念86
    5.2 Grism封裝及系統量測架設90
    5.3 Grismlens複合式分波多工器系統量測93
    5.4 結果分析與討論95
    第六章、結論與展望101
    參考文獻105
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    11. 張育淇, “極化繞射光學元件製作與檢測”, 中央大學光電科學研究所論文(2002)
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    15. C. Strandman, L. Rosengren, H. G. A. Elderstig, and Y. Backlund, “Fabrication of 45o mirrors together with well-defined V-grooves using wet anisotropic etching of silicon”, Journal of Microelectromechical Systems Vol.4, pp213~219(1995)
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    17. 陳科順, “多光束繞射光學元件應用在DVD光學讀取頭中之設計”,中央大學光電科學研究所論文 (1998)
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    19. E. Popov, J. Hoose, B.Frankel, C. Keast, M. Fritze, T. Y. Fan, D. Yost, and S. Rabe, “Low polarization dependent diffraction grating for wavelength demultimlexing”, Optics Express Vol.12, pp269~275 (2004)
    Advisor
  • Jeng-Yang Chang(張正陽)
  • Files
  • 91226031.pdf
  • approve in 1 year
    Date of Submission 2004-07-09

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