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Student Number 90226025
Author Sheng-Tien Shao(邵勝添)
Author's Email Address stshao@ios.ncu.edu.tw
Statistics This thesis had been viewed 1818 times. Download 1557 times.
Department Optics and Photonics
Year 2002
Semester 2
Degree Master
Type of Document Master's Thesis
Language English
Title Coimplantation of N ion and C ion into undoped GaN
Date of Defense 2003-06-30
Page Count 63
Keyword
  • C
  • GaN
  • implant
  • N
  • Abstract Coimplantation of N ion and C ion into undoped GaN
    Table of Content 目錄
    論文摘要..................................................................................................... I
    目錄............................................................................................................II
    圖表目錄....................................................................................................V
    第一章序論...............................................................................................1
    1.1 背景及研究動機............................................................................1
    1.2 實驗目的........................................................................................2
    第二章量測系統及原理簡述..................................................................4
    2.1 離子佈植簡述:............................................................................4
    2.2 量測系統及原理概述....................................................................5
    2.2.1 光激發光譜..........................................................................5
    2.2.1.1 光激發螢光法...................................................................5
    2.2.1.2 光激發螢光量測原理.......................................................6
    2.2.1.3 光子在能帶間之躍遷型式: .............................................7
    2.2.1.4 能隙隨溫度及摻雜濃度影響之變化: .............................8
    2.2.2 拉曼光譜量測......................................................................9
    2.2.2.1 拉曼光譜...........................................................................9
    2.2.2.2 拉曼光譜原理:................................................................10
    III
    2.2.2.3 大角度入射的拉曼光譜測定方法...............................11
    2.2.3 電流-電壓特性量測.........................................................12
    2.2.3.1 電流-電壓特性量測法...................................................12
    2.2.3.2 電流-電壓特性量測原理..............................................12
    第三章實驗方法及量測步驟................................................................13
    3.1 實驗準備......................................................................................13
    試片準備.....................................................................................13
    3.2 實驗步驟......................................................................................13
    3.3 電流-電壓特性效應量測元件製作...........................................15
    第四章結果與討論................................................................................16
    前言....................................................................................................16
    4.1 拉曼光譜討論與分析..................................................................16
    4.1.1 拉曼光譜...........................................................................16
    4.1.2 氮化鎵薄膜與拉曼光譜...................................................17
    4.1.3 拉曼光譜與離子佈值.......................................................18
    4.1.4 拉曼光譜與熱處理的修復過程........................................19
    4.2 PL 討論與分析............................................................................19
    4.2.1 氮化鎵的PL 光譜中之黃光放射....................................20
    4.2.2 離子佈植後的PL 光譜....................................................21
    IV
    4.3 電流-電壓效應量測之討論與分析............................................26
    4.3.1 電流-電壓效應量測.........................................................26
    4.3.2 離子佈植後的電流-電壓特性.........................................26
    第五章結論.............................................................................................28
    Reference 30
    參考文獻
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    [3] 曾建峰,‘有機金屬氣相磊晶法低溫砷化鎵的變溫霍爾量測及
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    Advisor
  • Ching-Ting Lee(李清庭)
  • Files
  • 90226025.pdf
  • approve immediately
    Date of Submission 2003-07-09

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