Title page for 90226014


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Student Number 90226014
Author Che-Wei Su(蘇哲暐)
Author's Email Address cwsu@ios.ncu.edu.tw
Statistics This thesis had been viewed 2327 times. Download 1592 times.
Department Optics and Photonics
Year 2002
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title Molecular Dynamics Simulation of thin film growth
Date of Defense 2003-06-24
Page Count 80
Keyword
  • molecular dynamics simulation
  • thin film growth
  • Abstract   Optical coating is a process in which a theoretical design is put into practice. The key to a successful production of high-quality thin film faithful to its original design is the choice and precise control of environment parameters during the deposition process. However, the relation between those parameters and the characteristics of thin film is not completely understood yet. Moreover, experiments have not been able to provide enough information with regard to the dynamic behavior and mechanism of thin film in the formation process and its microstructure and characteristics. Therefore this study takes a different approach and makes use of molecular dynamics simulation to construct a two-dimensional simulation system. Substrate temperature, incident kinetic energy, deposition rate, and incident angle are variables. The simulation results are then discussed to investigate the effects of the various environment parameters on thin film.
    Table of Content 英文摘要           
    中文摘要           
    目錄           
    圖目錄           
    表目錄           
    第一章 緒論
    第二章 薄膜理論
      2-1 簡介
      2-2 鍍膜系統與成膜機制的介紹
    第三章 分子動力學模擬(MD)理論
      3-1 MD簡介
      3-2 勢能函數
        3-2-1 Lennard-Jones potential
        3-2-2 Morse potential
      3-3 運動方程式
        3-3-1 Verlet’s Algorithm
        3-3-2 Leap-Frog Algorithm
        3-3-3 Gear’s Predictor-Corrector Algorithm
      3-4 截止位能
      3-5 表列法(Neighbor List)
        3-5-1 Verlet neighbor List
        3-5-2 Cell Link List
      3-6 週期性幾何邊界條件
      3-7 Rescaling
    第四章 模擬系統架構
      4-1 系統架設
        4-1-1 基板模型
        4-1-2 入射原子設定
      4-2 程式流程圖
      4-3 模擬系統平台
    第五章 模擬結果與分析
      5-1 基板溫度對膜質的影響
      5-2 入射動能對膜質的影響
      5-3 沈積速率對膜質的影響
      5-4 入射角度對膜質的影響
      5-5 三維模型的沈積模擬
    第六章 結論與未來展望
    參考文獻
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    Advisor
  • Cheng-Chung Lee(李正中)
  • Files
  • 90226014.pdf
  • approve in 1 year
    Date of Submission 2003-07-07

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