Title page for 86226027


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Student Number 86226027
Author Hsiao-Wei Kao(高孝維)
Author's Email Address No Public.
Statistics This thesis had been viewed 251 times. Download 6 times.
Department Optics and Photonics
Year 1998
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title
Date of Defense
Page Count 54
Keyword
  • diffusion barrier
  • GaN
  • ion implantation
  • Ohmic contact
  • thermal stability
  • Abstract
    Table of Content 誌謝………………………………………………….…II
    目錄……………………………………………………III
    圖目………………………………………………….…V
    第一章  緒論…………………………………………1
    第二章  歐姆接觸的原理
    2-1 前言………………………………………..3
    2-2 形成歐姆接觸的機制……………………..3
    2-3 N型氮化鎵形成歐姆接觸的機制………...4
    2-4 提升熱穩定性的方法……………………..6
    2-5 利用離子佈植增進歐姆特性的研究……..7
    第三章  實驗方法
    3-1 試片切割…………………………………..9
    3-2 高台蝕刻…………………………………..9
    3-3 歐姆接觸製程……………………………12
    3-4 離子佈植及擴散障壁層實驗……………12
    第四章  特性量測及結果分析
    4-1 歐姆接觸量測……………………………14
    4-1-1 量測原理…………………………...14
    4-1-2 量測結果分析……………………...15
    4-2 表面粗糙度量測…………………………18
    4-2-1 量測原理…………………………...18
    4-2-2 量測結果分析……………………...18
    第五章  結論………………………………………...20
    參考文獻……………………………………………...22
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    Advisor
  • Ching-Ting Lee(李清庭)
  • Files No Any Full Text File.
    Date of Submission

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