Title page for 83226025


[Back to Results | New Search]

Student Number 83226025
Author Chu Kun(iµO)
Author's Email Address No Public.
Statistics This thesis had been viewed 319 times. Download 0 times.
Department Optics and Photonics
Year 1995
Semester 2
Degree Master
Type of Document Master's Thesis
Language zh-TW.Big5 Chinese
Title The influence of O2 on the quality of DLC films deposited in a rf capacitively-coupled PECVD system
Date of Defense
Page Count 110
Keyword
  • capacitively-coupled;PECVD;asymmetric system
  • Abstract The research employs rf capacitively-coupled PECVD system to
    grow diamond-like films (DLF). The results show thats sp3-C
    content is increased, the transparence is higher from UV/
    Visible spectroscopy and hydrogen content is produced in the
    thin films when O2 is introduced. For the asymmetric system,
    the resulst show that the transparence of the films which were
    grown by CH4/ O2/Ne/H2 is higher than the films which were
    grown by CH4/O2/Ne or CH4/O2. The input-samples have higher sp3-
    C content than ground-samples. Under the operating condition
    that CH4 partial pressure is 40 mtorr, H2 partial pressure is
    20 mtorr, Ne partial pressure is 15 mtorr, O2 partial pressure
    is 6 mtorr and rf power is 15 watts, the DLF appear to cantain
    higher sp3-C content, higher transparence of UV/Visible
    spectroscopy and less hydrogen content.
    Table of Content
    Reference
    Advisor
  • Pei Li Chen(R)
  • Files No Any Full Text File.
    Date of Submission

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have dissertation-related questions, please contact with the NCU library extension service section.
    Our service phone is (03)422-7151 Ext. 57407,E-mail is also welcomed.